Abstract:The promotion of total factor productivity (TFP) of China's high-tech industry provides important support for the sustainable development of economy. Taking 30 provinces and cities in China as the research goal, this paper uses the Three-stage DEA model and Malmquist productivity index to study the static and dynamic TFP of high-tech industry in various regions from the eleventh five year plan to the 13th five year plan. It is found that after stripping the external environmental factors and random disturbance factors, the comprehensive efficiency and scale efficiency are overestimated, the pure technical efficiency is underestimated, and the low scale efficiency is the main reason restricting the promotion of TFP in China's high-tech industry. It can be seen that the bottleneck of China's pure technology improvement is still high technology efficiency, but China's pure technology improvement is still dominated by the malquist industry. Therefore, continuously expanding the industrial scale and maintaining R&D investment and technological innovation are important ways to promote the long-term development of China's high-tech industry.