Abstract:Science and technology innovation is the key power to promote the development of The Economic Transition in Shanxi province. On the basis of dividing of the Science and technology innovation process, the paper build the regional technological innovation efficiency model and index system in Shanxi Province, then use the chain network DEA method to measure 2000-2012 in Shanxi Province scientific and technological innovation efficiency value and evaluate the effciency which is divided into four parts. Empirical results concluded that optimize the management mode of science and technology, improve the efficiency of transformation of scientific and technological achievements, cultivate market-oriented scientific research system are effective ways to promote regional scientific and technological innovation performance in Shanxi.