Abstract:High-tech industry is a high-level knowledge-intensive industry, which is integrated in the intelligence of leading edge and new technologies group of capital-intensive. Firstly, the author simply introduces China"s 2000-2012 high-tech industry. Then, the author establishes an evaluation model on the base of Data Envelopment Analysis (DEA) model. Taking the 28 areas of high-tech industry of China as the empirical research object, the author firstly evaluates China"s 28 regional high-tech industry innovation performances with Malmquist DEA model for longitudinal evaluation, then use the super efficiency model to evaluate the innovation performance of 4 industries of high-tech industry for horizontal analysis. Finally, according to the empirical results, the author presents countermeasures to enhance the innovation performance.