Abstract:In this article the panel data of input-output of engineering survey and design industry in 31 provinces of China from 2006-2011 were analyzed by SFA and the technical efficiency and its variation of the industry of each province was evaluated. And non-technical factors that affect the efficiency of the industry were conducted a quantitative calculation and regression analysis. The results showed that: technical inefficiency outputs function has a significant impact on output, the introduction of technical inefficiency term is very necessary. There is a negative correlation between the technical inefficiency term and the variables that On behalf of the degree of market (Z1), certified enrollment proportion (Z3)and scale economies (market capacity) (Z5);and There is an active correlation between the technical inefficiency term and the variables that On behalf of the Research investment (Z2) and the percentage of senior titles. The industry output elasticity of labor input (0.6721) is much larger than the output elasticity of capital investment (0.4403).