Abstract:This paper is based on the location entropy as China's provinces and cities manufacturing Accumulation Index indicators, using a three-stage Super-SBM DEA model on the size of the variable remuneration to measure China's provinces and cities (except Tibet) technology innovation efficiency, to explore the influence of industry agglomeration on the technological innovation efficiency based on 2005—2014 Provincial Panel Data. Results show under the control of the openness and institution innovation , industry agglomeration has a positive influence on technological innovation efficiency; and with the promotion of industrial agglomeration, technological innovation efficiency decreases first, afterwords increases, then decreases, namely, the growth effect of industry agglomeration is in line with the ‘inverted N-type’ hypothesis.