Abstract:This paper using DEA model, by constructing the evaluation index system, measured the innovation driven development’s efficiency level of China’s 30 provinces in 2004-2014 respectively from innovation driven development of knowledge and development of economic environment two angles, then studied the ascension path quantitatively on that basis. The results showed that, first, the innovation driven development of knowledge’s efficiency was higher than development of economic environment’s efficiency on the whole; second, there were big differences of two kinds of efficiency in different provinces; third, this two kinds of efficiency were disconnect in some provinces, that was to say the efficiency showed the opposite trend; forth, the innovation driven development of knowledge’s efficiency showed a trend of increasing returns to scale in china’s 23 provinces, meanwhile the innovation driven development of economic environment’s efficiency showed a trend of diminishing returns to scale in china’s 19 provinces. Finally, according to the results of DEA analysis, regarded the region whose technical efficiency value was 1 as a benchmarking, and improved the technical efficiency of the region whose efficiency didn’t reach 1 by combination of benchmarking region, so as to improve the efficiency of regional innovation driven development.