Abstract:Collecting the panel data of high and new technology industry between 2000 and 2014. Using three-stage DEA model, the paper measured the high and new technology industry R&D efficiency in our country, analyzed the key factor’s influence on it. Research shows that: 1. R&D efficiency loss of high-tech industries in China is common in the industry, and efficiency difference between industries is more obvious. 2. Key factor’s influence on the R&D personnel and funds input slack variable is: technical support and government support are significantly positive. Degree of openness of market structure, property right structure, enterprise scale and market structure are significantly negative. Industry performance has no significant negative impact on R&D staff redundancy, and has no significant positive influence on R&D funds slack variable. 3. The environmental factors inflate the value of R&D efficiency. 4. The ascension of R&D total factor productivity is mainly thanks to technological progress. Scale efficiency is the most important factor of comprehensive technical efficiency change. Based on this, the paper puts forward effective policy recommendations to enhance the high and new technology industry R&D efficiency.