Abstract:This paper uses the comprehensive weight TOPSIS method to analyze the scientific and technological innovation ability of Xi"an based on the panel data of Xi"an"s science and technology innovation from 2005 to 2014,then using the BCC model, the super efficiency DEA model and the Malmquist index to analyze the performance of Xi"an"s science and technology innovation.Results show that since 2005, the input capability , the output capability, the comprehensive capability of Xi"an"s science and technology innovation are presented ascending trend year by year, while the performance level of science and technology innovation presents the trend of first decrease and then rise. In addition to 2010, Xi"an"s science and technology innovation are effective DEA,the harmonious development between the ability and efficiency of science and technology innovation presents the trend of improving year by year.At present, Xi"an"s science and technology development is still in the extensive mode of growth, the main reasons for the decline of total factor productivity of science and technology innovation are the decline of technical efficiency and scale efficiency, while the technological progress has a certain role in promoting the development of science and technology.