Abstract:Taking the perspective of innovation value chain, we divided the technology innovation into two interrelated processes, the R&D process and the industrialization process. Then we measured the regional innovation efficiency of each process using 2005-2015 panel data of 30 provinces in China by DEA method. Furthermore, we tested the relationship of financial development and regional innovation efficiency by panel Tobit model. The study found that: the financial depth and financial width can both improve the innovation efficiency; In the R&D process, the financial depth has a more significant effect on the regional innovation efficiency.In the industrialization process, the financial width can improve the innovation efficiency much more compared with financial depth.