Abstract:Based on the three-stage DEA and Tobit model,this paper try to calculate the efficiency and the influencing factors of regional science and technology finance in every Chinese provices in 2015,The results show that.The efficiency of most regional science and technology finance is generally low,Only Beijing, Heilongjiang,Zhejiang,Henan,Guangdong hane reached the standard of high-efficiency production.For most regions,the efficiency need to be improved. Research input of high-tech industry, regional legalization, financial development, technological innovation have poisitve influence on efficiency of regional science and technology finance,and research input of high-tech industry has the highest impact. Total profits of high-tech industries and financial support of government agencies have no significant have negative influence on efficiency of regional science and technology finance.According to the above empirical analysis,this paper puts forward suggestions to improve the efficiency of China: Local governments should increase investment in research funding for high-tech industries and improve the system of investment,increase the level of regional legalization and ensure the normal and effective operation of scientific and technological financial markets,increase financial development, increase capital accumulation and optimize resource allocation,encourage innovation in science and technology, regulate scientific research funds, and actively play a leading role.