Abstract:The report of the 19th CPC National Congress emphasizes that the reform of economic development quality, efficiency, and power reforms should be promoted to increase total factor productivity so as to continuously enhance China''s economic innovation and competitiveness. This paper uses the two-stage DEA method to divide the innovation process of high-tech industry into R&D output stage and economic transformation stage. It measures the innovation efficiency of high-tech industries in 11 cities in Zhejiang Province from 2006 to 2015, and studies innovation in high-tech industries. The different stages of the process, the size of the efficiency of each city. The results show that there are mismatches in input resources and redundancy in different stages of Zhejiang cities. Based on the empirical results, suggestions are made on how to improve the efficiency of innovation in high-tech industries in Zhejiang Province.