Abstract:Traditional data envelopment analysis (DEA) and stochastic frontier analysis (SFA) can not eliminate the influence of environmental factors and random errors, so the evaluation results are not true.This paper studies the innovation efficiency of high-tech industries and its influencing factors in the western regions of China by using the three-stage DEA model combined with the two, the results show that the overall technological innovation efficiency of high-tech industries in the western region of China is at a low level, and the insufficient scale of innovation investment is the main bottleneck restricting the improvement of innovation efficiency, the level of government support and regional economic development are not conducive to the reduction of innovation resource redundancy, while market openness can significantly promote the improvement of innovation efficiency, at the same time, the expansion of enterprise scale is favorable to reduce the redundancy of manpower input but has a negative effect on reducing the redundancy of financial and material input. Further, according to pure technical efficiency and scale efficiency, the technological innovation efficiency of high-tech industry in the western region of China can be divided into four different types. Finally, the paper puts forward corresponding countermeasures and suggestions according to the analysis results.