Abstract:This paper selects the listed information technology service enterprises in Beijing, Shanghai and Guangdong from 2013 to 2018 as the research samples, and takes the Three-stage DEA model as the main research method to measure and evaluate the innovation efficiency of information technology service enterprises. The empirical results show that: government subsidies, ownership concentration and the nature of state-owned property rights of enterprises will increase the redundancy of innovation input, while the scale of enterprises and the level of regional economic development will inhibit the redundancy of innovation input; the value of innovation comprehensive efficiency of information technology service enterprises is low, which is mainly due to the low efficiency of pure technology and the unreasonable structure of resource input, resulting in the allocation and transformation of resources According to the pure technical efficiency and scale efficiency, the sample enterprises are divided into five types. Finally, this paper puts forward suggestions to improve the innovation efficiency of information technology service enterprises.