Abstract:In the study on the innovation efficiency of 83 Innovative Industrial Clusters(IIC) in China's High-tech Industrial Development Zone in 2018, it is found that the technical efficiency values obtained by using traditional DEA and three-stage DEA are quite different, and the traditional DEA fails to truly and objectively reflect the innovation efficiency of IIC. When environmental variables and random disturbances are not considered, the pure technical efficiency of most IIC is too low, and the scale efficiency is often overestimated, resulting in the underestimation of technical efficiency. After stripping out environmental variables and random disturbances, the pure technical efficiency of most IIC increased greatly, and the scale efficiency decreased, and the technical efficiency was improved accordingly.