Abstract:[Purpose / significance] the essence of high-tech industry is an innovation driven industry, which has high requirements for industrial ecology. So far, the support for high-tech industry mainly focuses on the breakthrough and industrialization of high-tech technology. In fact, the development of high-tech and sophisticated industries not only depends on the breakthrough of science and technology, but also the whole supporting and supporting system, including business environment, supporting investment and complementary products. Just as the biological community is an organic whole, the development of industry also depends on a healthy ecological environment. Only a healthy industrial ecosystem can support the growth and transformation of emerging technologies, emerging business models and emerging enterprises, and then promote the prosperity of high-end industries. Therefore, in addition to technological innovation and industrialization, it is necessary to study the cultivation and development of high-precision industries from the perspective of industrial ecosystem. [design / method] the index system of key elements for the development of high-tech industrial ecosystem is constructed, including six key elements: diversity and inclusiveness, nutrients, metabolism, energy conversion, correlation between main elements and environmental support. The evaluation index is weighted by entropy method, and the evaluation model is constructed by limiting factor and TOPSIS method to evaluate and analyze the high-tech industrial ecosystem in Beijing. [conclusion / findings] according to the evaluation, the comprehensive score of Beijing"s high-precision industrial ecosystem gradually increased from 0.8868 in 2016 to 0.9970 in 2020, indicating that Beijing"s high-precision industrial ecosystem is developing well as a whole; At the same time, it is found that the four factors of full-time equivalent of R amp; D personnel, input-output efficiency, the number of industrial technology innovation strategic alliances and the combination level of industry, University and research are the limiting factors of Beijing"s high-precision and cutting-edge industries, which should be broken through.