Abstract:Based on the panel data of China"s high-tech industry from 2010 to 2020, the panel threshold regression model was adopted to study the impact of enterprise scale quality and government subsidies on innovation efficiency of high-tech industries, with the enterprise scale quality as the threshold variables. Further, the provinces in China was divided into two regions: the east provinces and the central and western provinces, in order to compare the regional heterogeneity of the impact. The results show that the impact of government subsidies on the innovation efficiency of high-tech industries has a significant threshold effect, and this threshold effect has certain regional differences, with enterprise scale quality as the threshold variable. It has a double threshold effect for the national provinces and the central and western provinces, and a single threshold effect for the eastern provinces. The conclusion provides new enlightenment for China to allocate resources more reasonably and efficiently and guide the development of high-tech industries in the new era.