Abstract:The healthy development of high-tech industry is an important strategic support for China's economic take-off, and the rapid improvement of its extension efficiency is an important way to achieve the effective integration of innovation chain and industrial chain. This paper uses the DEA efficiency measurement model and fuzzy set qualitative comparative analysis (fsQCA) method to deconstruct the actual situation of the extension efficiency development of China's high-tech industrial chain and explore the specific path of efficient improvement of China's high-tech industrial chain extension efficiency by taking the development status of high-tech industrial chain in 31 provinces in China as a research sample. The results show that the overall efficiency of the extension efficiency of China's high-tech industrial chain structure is low at this stage, and the development level of the eastern, central and western regions is unbalanced, which urgently needs to be further improved and balanced. At the same time, there is a corresponding synergy relationship between the improvement of the extension level of the high-tech industrial chain and the guarantee of internal and external resource elements of industrial development, and it is difficult for single-type resource elements to constitute the necessary conditions for the high-level extension efficiency of the high-tech industrial chain. There are four configuration paths to improve the extension efficiency of the high-tech industrial chain, namely: (1) a market-oriented conditional configuration path with marketization level as the core element and innovation output application validity as the auxiliary condition; (2) a government-supported condition-oriented configuration path with government support as the core element and capital investment capacity as the supplement; (3) the configuration path of capital investment-oriented conditions that match the intensity of technological innovation investment and capital investment capacity; (4) A multi-factor combination driving path with the application validity of innovation output as the core element and capital investment capacity, government support and marketization level as the auxiliary elements.