Abstract:Equity structure of mixed ownership is the basic issue that affects the innovation decision of technology enterprises. This thesis establishes an equity structure model of "control rights–shareholder structure–management shareholding" and explores the equity allocation method to improve the innovation performance of semiconductor enterprises with fsQCA. The study found that there are four types configurations that produce high innovation performance: "SOE led with balanced equity structure of SOE and non-SOE", "non-SOE led multi-equity with equity incentives ", "inducting strategic capital-mixed multi-equity with balanced equity structure of SOE and non-SOE ", and " mixed multi-equity with balanced equity structure of SOE and non-SOE with equity incentives ". A high degree of mixed equity balance holds the key to preeminent innovation performance. Also, there is a certain substitution relationship between strategic capital and management equity incentives. This thesis provides empirical evidence for promoting the two-way mixed ownership reform of semiconductor enterprises.