Abstract:The high technological intensity and long innovation chain of the semiconductor industry necessitate a broader perspective on investigating the collaborative willingness within China's semiconductor industry alliance. Using the industrial ecochain theory as an analytical framework, a three-party evolutionary game model of the semiconductor industrial ecochain is constructed from the perspectives of production, research, and service, aiming to explore the various factors affecting the stable development of the industrial ecochain. Additionally, a simulation analysis of the game model is conducted based on panel data from Chinese semiconductor publicly listed companies between 2016 and 2021. The study reveals that the collaborative operation of the industrial ecochain is influenced by the combined actions of different actors. In comparison to collaborative benefits, the parties are more sensitive to changes in costs. Moreover, the willingness of production and research entities to cooperate significantly impacts the strategic choices of service companies. Cost and benefit distribution mechanisms affect the willingness of the actors to participate, and there exists an optimal benefit distribution coefficient that maximizes the willingness of production and research entities to adopt collaborative strategies. While an increase in the value of supporting services enhances collaborative benefits in the industry, it does not significantly promote active cooperation among the parties. Thus, enhancing industrial innovation efficiency and constraining actor behaviors are crucial for promoting the proactive operation of the semiconductor industrial ecochain. Therefore, it is necessary to strengthen government guidance and support for the industrial ecochain, while also establishing a robust mechanism for sharing the benefits of the industrial ecochain, primarily based on the principle of remuneration according to work contribution.